Business Overview

Component Business

CVD SiC (Chemical Vapor Deposition Silicon Carbide) is a technology that deposits SiC using the chemical vapor deposition
method. Over the years, we have developed the capability to deposit from thin films to bulk forms of several millimeters,
securing a stable production process.

Overview

Bulk CVD SiC

Coated CVD SiC

Si & Ceramic

Bulk CVD SiC Components

Produced via CVD processes, these high-performance materials offer excellent durability in high-temperature, high-pressure, and chemically corrosive environments, making them widely used in semiconductor, aerospace, and energy industries. In particular, CVD SiC parts used in semiconductor processes improve process yield with high durability and stability.

Product
Features

High corrosion
resistance

High chemical
resistance

Long lifetime
compared to Si

No heat
deformation

High-purity particle generation
suitable for semiconductor
processes

Excellent hardness
and strength

CVD-SiC Properties

Property	KNJ Value	Unit
Purity	99.9999	-
Density	3.21	g/cm³
Porosity	Negligible	-
Elastic Modulus	466	GPa
Flexural Strength	506.7	MPa
Vickers Hardness	2540	kg/mm²
Thermal Conductivity	267.2	W/m*K
CTE(100~1000°C)	4~4.5	10⁻⁶/K
Volume Resistivity	According to customer requirements	Ω*cm

Product Lineup

01

SiC Focus Ring

The SiC Focus Ring is primarily used in the etching process. It surrounds the wafer’s edge to uniformly distribute plasma, ensuring precision and consistency in the process.
02

SiC Ring / Cover Plate for Power
Semiconductors

The SiC Ring used in power semiconductor manufacturing ensures electrical insulation and stability in high-voltage and high-current processing environments.
03

Shower Head (Electrode)

The Shower Head is used primarily in the CVD (Chemical Vapor Deposition) process of semiconductor manufacturing, where it evenly disperses gas to enhance the uniformity of the deposition process.
04

SiC Dummy Wafer

The polycrystalline SiC wafer is used for process testing or to verify conditions in processes such as PVD, CVD, oxidation, and etching.

Contact

Contact Person

Mr. LEE, Chang Min / Sales Team Leader
Tel

070-7201-8963
Email

changmin.lee@knj.kr